- Course code
- ELL730
- L-T-P
- 3-0-0
- Credits
- 3
Course Introduction, Modern Semiconductor IC fabrication Industrial/Academic Landscape; Overview of modern CMOS process flow basic steps; Crystal growth and wafer basics; Cleanroom basics environment, infrastructure, advanced MOS cleaning, getering etc.|Lithography; Oxidation; Diffusion; Ion-Implantation; Thin-Film Deposition; Etching; Backend processes; Process Simulation- tools, techniques and methods; Advanced device fabrication concepts I (SOI, FDSOI, etc); Advanced device fabrication concepts II (organic, PV, hetero); Advanced device fabrication concepts III (CNTs, Self-assembly etc).